title: MODELING OF THE SELF-ORGANIZATION PROCESS OF DSA-LITHOGRAPHY USING CELLULAR AUTOMATA
abstract: Сellular automaton model is presented. The results for the 2D case are given.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis