title: INFLUENCE OF TECHNOLOGICAL PARAMETERS ON THE PROPERTIES OF PHOTOSENSITIVE STRUCTURES WITH NANOCRYSTALLINE SILICON
abstract: In this work, the influence of technological parameters on the current-voltage characteristics of solar cells with nanostructured silicon was studied. It is shown, that for structures with a developed surface, the selection of optimal diffusion regimes is required.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis