title: MATHEMATICAL MODEL OF THE DEVELOPMENT OF MANUFACTURING DEFECTS IN THE SURFACE LAYER OF SUBSTRATES OF MOEMS’ FUNCTIONAL COMPONENTS
abstract: A mathematical model of the development of manufacturing defects, with the prediction of the random component of the model in the substrates of functional components of MOEMS, which are made of semiconductors, in particular, silicon, are developed in the article. The main manufacturing defects that arise in the surface layer of the substrates of the MOEMS functional components taking into account the technological processes of their production and dynamic processes were used when developing the 
journal: Eskişehir Technical University Journal of Science and Technology A - Applied Sciences and Engineering