title: DEVELOPMENT OF A TOOL FOR GENERATING A SET OF CLIPS FOR CONDUCTING SMO
abstract: In this paper present the development of a tool for generating a set of clips for 28nm and below technology nodes and the research a library of clips for the presence of forbidden steps.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis