title: MODELING THE TOPOLOGICAL NON-UNIFORMITY OF THE LAYERS DEPOSITED FROM THE GAS PHASE ON A SUBSTRATE MICRORELIEF
abstract: Expressions are proposed for the profile of layers deposited from the gas phase in trenches and on terrain ridges of integrated circuits.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis