title: SYNTHESIS AND CONDUCTING PROPERTIES OF SILICONCARBON NANOSTRUCTURES OBTAINED BY THE METHOD HIGH-TEMPERATURE PLASMA-CHEMICAL SYNTHESIS
abstract: A method for obtaining nanostructured carbon and silicon powder materials is considered. Shown are micrographs of the obtained nanocrystalline silicon. The temperature dependences of the conductivity of nanocrystalline silicon, fullerene-containing material, and a silicon-carbon compound obtained by plasma-chemical synthesis are presented.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis