title: WAVE SOLID-STATE GYROSCOPE MODELLING
abstract: A model of wave solid-state gyroscope was developed, the dependence of the vibration working mode on the voltage amplitude on the electrodes were defined. The functional model of the gyroscope was developed.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis