title: FEATURES OF FORMATION AND FUNCTIONAL CHARACTERISTICS OF MULTILAYER SYSTEMS BASED ON POROUS SILICON
abstract: In this work, the features of the phase composition and chemical bonds of the surface of multilayer porous silicon samples grown under different conditions were investigated by methods of optical and X-ray spectroscopy.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis