title: PLANAR GAS CHROMATOGRAPHIC COLUMNS MANUFACTURED ON SILICONE SUBSTRATES
abstract: This paper presents the main stages in the development of technology for the manufacture of planar gas chromatographic columns.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis