title: ORDERED GROUPS OF GE (SI) QUANTUM DOTS ON SOISUBSTRATES INTEGRATED INTO PHOTONIC CRYSTALS
abstract: Experimental and calculated data on the creation of ordered groups of Ge (Si) quantum dots on structured SOI substrates are presented. The luminescence properties of the obtained structures, including those embedded in photonic crystals, are investigated.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis