title: FEATURES OF THE GROWTH OF CASI2 LAYERS ON CAF2/SI(001) SUBSTRATES
abstract: In this work the results on the growth of CaSi2 layers on CaF2/Si(001) substrates are presented.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis