title: IMPLEMENTATION OF FUNCTIONAL COMPLETENESS SET OF LOGIC GATE BASED ON MEMS
abstract: The variants of execution of logic gates of a functionally complete set based on microelectromechanical systems (MEMS) are presented.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis