title: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis
abstract: ( ) - - ( ) -2020 -2020 XIII -2020 XII , , , , . , . , 21-25 2020 . - , .. -2020