title: 3-D MODEL OF MULTICRYSTALLINE SILICON INGOT BASED ON PHOTOLUMINISCENT IMAGES OF WAFERS
abstract: The paper presents a technique for generation 3Dimages of the internal structure of a multicrystalline silicon ingot.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis