title: METHOD OF FORMING TEST PATTERNS TO INCLUDE INTO MPW
abstract: In this work the standard route of test structures formation is considered. A new method based on it is developed. The method allows generating test structures permitted to include into MPW.
journal: International Forum “Microelectronics – 2020”. Joung Scientists Scholarship “Microelectronics – 2020”. XIII International conference «Silicon – 2020». XII young scientists scholarship for silicon nanostructures and devices physics, material science, process and analysis