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"operation_id": "deposit_1", "step_index": 5, "machine_id": "depo_01", "machine_group": "deposition", "start_h": 290.84, "end_h": 296.24, "setup_time_h": 0.48, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0019", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 297.17, "end_h": 303.2, "setup_time_h": 0.42, "is_batch": true, "batch_id": "B-cleaning-297", "is_rework": false }, { "lot_id": "LOT-0013", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 303.2, "end_h": 308.63, "setup_time_h": 0.0, "is_batch": true, "batch_id": "B-cleaning-303", "is_rework": false }, { "lot_id": "LOT-0011", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 308.63, "end_h": 313.41, "setup_time_h": 0.53, "is_batch": true, "batch_id": "B-cleaning-308", "is_rework": false }, { "lot_id": "LOT-0005", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 313.41, "end_h": 318.56, "setup_time_h": 1.18, "is_batch": true, "batch_id": "B-cleaning-313", "is_rework": false }, { "lot_id": "LOT-0001", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 318.56, "end_h": 323.34, "setup_time_h": 0.71, "is_batch": true, "batch_id": "B-cleaning-318", "is_rework": false }, { "lot_id": "LOT-0002", "operation_id": "inspect_1", "step_index": 4, "machine_id": "insp_01", "machine_group": "inspection", "start_h": 294.68, "end_h": 301.66, "setup_time_h": 0.94, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0009", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 323.34, "end_h": 330.66, "setup_time_h": 0.72, "is_batch": true, "batch_id": "B-cleaning-323", "is_rework": false }, { "lot_id": "LOT-0006", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 330.66, "end_h": 333.41, "setup_time_h": 0.0, "is_batch": true, "batch_id": "B-cleaning-330", "is_rework": false }, { "lot_id": "LOT-0017", "operation_id": "inspect_1", "step_index": 4, "machine_id": "insp_01", "machine_group": "inspection", "start_h": 301.66, "end_h": 305.96, "setup_time_h": 0.5, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0021", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 333.41, "end_h": 338.99, "setup_time_h": 0.97, "is_batch": true, "batch_id": "B-cleaning-333", "is_rework": false }, { "lot_id": "LOT-0016", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 338.99, "end_h": 343.11, "setup_time_h": 0.86, "is_batch": true, "batch_id": "B-cleaning-338", "is_rework": false }, { "lot_id": "LOT-0007", "operation_id": "deposit_1", "step_index": 5, "machine_id": "depo_01", "machine_group": "deposition", "start_h": 296.24, "end_h": 302.13, "setup_time_h": 0.5, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0003", "operation_id": "inspect_1", "step_index": 4, "machine_id": "insp_01", "machine_group": "inspection", "start_h": 305.96, "end_h": 312.14, "setup_time_h": 0.39, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0014", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 343.11, "end_h": 348.93, "setup_time_h": 1.02, "is_batch": true, "batch_id": "B-cleaning-343", "is_rework": false }, { "lot_id": "LOT-0002", "operation_id": "deposit_1", "step_index": 5, "machine_id": "depo_01", "machine_group": "deposition", "start_h": 302.13, "end_h": 307.08, "setup_time_h": 0.71, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0017", "operation_id": "deposit_1", "step_index": 5, "machine_id": "depo_01", "machine_group": "deposition", "start_h": 307.08, "end_h": 313.73, "setup_time_h": 0.87, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0007", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 348.93, "end_h": 356.02, "setup_time_h": 0.71, "is_batch": true, "batch_id": "B-cleaning-348", "is_rework": false }, { "lot_id": "LOT-0003", "operation_id": "deposit_1", "step_index": 5, "machine_id": "depo_01", "machine_group": "deposition", "start_h": 313.73, "end_h": 319.92, "setup_time_h": 0.0, "is_batch": false, "batch_id": null, "is_rework": false }, { "lot_id": "LOT-0002", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 356.02, "end_h": 360.86, "setup_time_h": 0.31, "is_batch": true, "batch_id": "B-cleaning-356", "is_rework": false }, { "lot_id": "LOT-0017", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 360.86, "end_h": 367.3, "setup_time_h": 0.96, "is_batch": true, "batch_id": "B-cleaning-360", "is_rework": false }, { "lot_id": "LOT-0003", "operation_id": "clean_2", "step_index": 6, "machine_id": "clea_01", "machine_group": "cleaning", "start_h": 367.3, "end_h": 374.03, "setup_time_h": 1.19, "is_batch": true, "batch_id": "B-cleaning-367", "is_rework": false } ], "wip_snapshots": [ { "stage": "lithography", "wip_count": 7, "wip_cap": 7, "queue_time_h": 73.53 }, { "stage": "etching", "wip_count": 7, "wip_cap": 7, "queue_time_h": 14.53 }, { "stage": "cleaning", "wip_count": 7, "wip_cap": 7, "queue_time_h": 40.41 }, { "stage": "inspection", "wip_count": 7, "wip_cap": 7, "queue_time_h": 12.99 }, { "stage": "deposition", "wip_count": 4, "wip_cap": 7, "queue_time_h": 1.64 } ], "bottleneck_insights": [ { "stage": "lithography (reentrant pass)", "constraint_type": "qualification", "severity_score": 0.85, "explanation": "Primary delay driver is NOT aggregate lithography capacity. Only 2 of 4 lithography tools are qualified for reentrant logic products at step 4. Lots queue waiting for qualified tools while other lithography machines remain underutilized.", "recommended_action": "Qualify additional lithography tools for logic_7nm reentrant passes, or temporarily dedicate one tool to reentrant lots to relieve step-4 WIP buildup." }, { "stage": "cleaning", "constraint_type": "batch_wip_limit", "severity_score": 0.72, "explanation": "Cleaning WIP at 7/7 \u2014 batch machine starvation risk on reentrant cleaning pass.", "recommended_action": "Batch compatible lots at cleaning or increase batch chamber throughput." } ], "metrics": { "mean_cycle_time_h": 218.51, "p95_cycle_time_h": 246.69, "throughput_lots_per_week": 9.88, "avg_wip": 12.85, "on_time_delivery_pct": 0.0, "machine_utilization_pct": 46.9, "total_setup_h": 79.46, "num_reschedules": 0, "schedule_stability_score": 60.3, "yield_pct": 95.8, "tardiness_h": 4406.53 }, "notes": [ "Rework triggered for LOT-0015 at etch_1", "Rework triggered for LOT-0022 at etch_1", "Rework triggered for LOT-0010 at litho_2", "Rework triggered for LOT-0002 at litho_2", "Rework triggered for LOT-0017 at litho_2", "Rework triggered for LOT-0007 at deposit_1", "Rework triggered for LOT-0003 at inspect_1", "Dispatching rule: atc_dispatch \u2014 scheduled 168 operations." ] } }