| dataset: |
| title: "PFNC GST HAADF-STEM/EDS Tomography — Lamella b2_d3" |
| repository_slug_recommended: "pfnc-gst-haadf-stem-eds-tomography-b2-d3" |
| version: "1.0.0-release-candidate" |
| license: "cc-by-nc-nd-4.0" |
| release_authorization: |
| cea: true |
| sample_owner: true |
|
|
| provenance: |
| lamella_identifier: "b2_d3" |
| filename_identifier: "D3" |
| dataset_provider: "Daniel Del Pozo Bueno" |
| original_acquisition_operator: |
| name: "Zineb Saghi" |
| email: "zineb.saghi@cea.fr" |
| curator: |
| name: "Daniele Picone" |
| email: "daniele.picone@cea.fr" |
| scientific_contact: |
| name: "Daniel Del Pozo Bueno" |
| email: "daniel.delpozobueno@cea.fr" |
| pfnc_contact: |
| name: "Zineb Saghi" |
| email: "zineb.saghi@cea.fr" |
| dataset_organization: "CEA-Leti, Grenoble" |
| acquisition_facility: "PFNC, CEA Grenoble" |
| acquisition_institute_context: "CEA-Liten" |
|
|
| instrument: |
| manufacturer: "Thermo Fisher Scientific" |
| model_family: "Titan Themis" |
| exact_generation_or_submodel: "UNKNOWN" |
| operating_voltage_kv: 200 |
| probe_corrected: true |
| eds_system: |
| name: "Super-X" |
| detector_type: "silicon drift detector" |
| detector_count: 4 |
| embedded_identifier: "SuperXG1" |
| software: |
| name: "Velox" |
| version: "3.17.0.967-b5399cab" |
| emd: |
| format: "Velox EMD" |
| format_version: 11 |
|
|
| sample: |
| identifier: "b2_d3" |
| filename_identifier: "D3" |
| system: "Ge-Sb-Te phase-change-memory device" |
| specimen: "cross-sectional FIB lamella" |
| operational_state: "UNKNOWN: virgin or SET" |
| approximate_gst_region_thickness_nm: 50 |
| holder: "Fischione single-axis tomography holder" |
| tilt_axis_relation: "parallel to GST layer" |
|
|
| acquisition: |
| date: "2025-07-07" |
| accelerating_voltage_kv: 200 |
| beam_current_pa: 115 |
| camera_length_mm: 110 |
| pixel_size_angstrom: 10.67 |
| frame_shape_vu: [400, 300] |
| dwell_time_us: 40 |
| frames_per_tilt: 50 |
| time_per_frame_s: 5.57 |
| cumulative_time_per_tilt_s: 278.5 |
| intended_angles_deg: [-40, -35, -30, -25, -20, -15, -10, -5, 0, 5, 10, 15, 20, 25, 30, 35, 40] |
| retained_angles_deg: [-40, -35, -30, -25, -20, -15, -10, -5, 0, 10, 15, 20, 25, 30, 35, 40] |
| discarded_angle_deg: 5 |
| discarded_acquisition_number: 10 |
| discarded_reason: "acquisition corruption" |
|
|
| raw_data: |
| filename_pattern: "D3_EDS-HAADF_<acquisition>_<signed-angle>.emd" |
| haadf: |
| shape_per_tilt: [400, 300, 50] |
| dtype: uint16 |
| eds: |
| spectral_bins: 4096 |
| frames_per_tilt: 50 |
| stream_dtype: uint16 |
| integrated_spectrum_dtype: uint32 |
| rendered_map_mode: NetIntensity |
| embedded_elements: [N, O, Si, Ti, Ge, Sb, Te] |
|
|
| derived_data: |
| haadf_alignment: |
| reference_angle_deg: 0 |
| shift_units: pixels |
| parameter_shape: [16, 2] |
| component_order: UNKNOWN |
| sign_convention: UNKNOWN |
| elemental_stacks: [Ge, Sb, Te, Ti, Si] |
|
|
| associated_study: |
| title: "Unsupervised Deep Learning for Limited-Angle STEM-EDX Tomography -- Application to 3D Chemical Analysis of Phase-Change Memory Devices" |
| arxiv: "2606.10547" |
| doi: "10.48550/arXiv.2606.10547" |
| association_status: "confirmed by dataset provider" |
|
|
